Reference
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This page will contain links to reference material on safety in the lab, the SEM, equipment instructions, and other MEMS groups. Please give me suggestions of material to inculde (and the items themselves, if possible!)
Laboratory Information
General Laboratory Safety
Information
Technical Talk Guidelines
Dry Oxidation, Ghandhi, Second Edition, (100)
Si
Wet Oxidation, Ghandhi, Second Edition, (100)
Si
Thin Oxidation, Ghandhi, Second Edition,
(100) Si
Thermal Conductivity of Si, Ge, C, SiO2,
from Sze
Equipment Operation Procedures
SEM Operation Quick Reference
SEM Cautions!
SEM Operation Manual
SEM Study Guide (For written exam)
MRC Manual Pumpdown Procedure
NPGS e-beam system
Processes and Spec Sheets
Shipley Megaposit SPR 220 Data Sheet
Interesting Links to MEMS Resources
Berkeley
Sensors and Actuators Center
Stanford Microstructures
and Sensors Lab
UCLA MEMS Home Page
University of
Michigan MEMS Faculty
MEMS Clearinghouse
Dave Banks' Introduction to
MEMS
Bill Trimmer's MEMS Page
TI
Micromirror Device
MST NEWS (Newsletter on MEMS)
Web Elements (Physical properties of
the elements)
E-beam reference at
Cornell
MFL Home | Personnel | Programs | Facilities | Reference
Maintained by Nicol McGruer, mcgruer@ece.neu.edu.
Copyright (c) 2001 by Northeastern University. All rights
reserved.